APPARATUS INCLUDING ELECTROMAGNETIC WAVEGUIDE AND PLASMA SOURCE

PROBLEM TO BE SOLVED: To provide a plasma source having the structure that generates symmetric plasma.SOLUTION: The apparatus comprises: an electromagnetic waveguide 101; a first iris slot 110 crossing the waveguide 101 at a first position along a length of the waveguide 101 and having a height less...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	THOMAS ERWIN PREUSS, MICHAEL RON HAMMER, JOHN PILLANS
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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