CHECKING DEVICE

PROBLEM TO BE SOLVED: To achieve a checking device capable of checking the inside face of a pellicle frame which has not been heretofore checked as for a pellicle-fitted photomask.SOLUTION: Disclosed is a testing device comprising: a light source (1) generating a light beam; scanning optical systems (3, 4) scanning the inside face of a pellicle frame by the light beam emitted from the light source to a line shape along the inside face of the pellicle frame and the first direction parallel to the pellicle face; an imaging lens (8) receiving the scattered light emitted from the inside face of the pellicle frame; and an imaging apparatus (9) receiving the scattered light emitted from the imaging lens. The device also comprises means (11, 6) relatively moving an optical stage or a photomask to the second direction and the third direction orthogonal to the first direction. By the beam scanning in the first direction and the relative movement in the second and third directions, two-dimensional scanning is performed regarding the inside face and the pattern face of the pellicle frame and the pellicle face. The scattered light from these examination surfaces is detected to form scattered light images, and foreign matter defects are detected based on the formed scattered light images.