LIQUID JET HEAD, LIQUID JET DEVICE AND ACTUATOR DEVICE
PROBLEM TO BE SOLVED: To provide a liquid jet head, a liquid jet device and an actuator device with improved displacement characteristics.SOLUTION: A liquid jet head is equipped with: a pressure generating chamber which communicates with a nozzle opening for jetting liquid; and a piezoelectric eleme...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a liquid jet head, a liquid jet device and an actuator device with improved displacement characteristics.SOLUTION: A liquid jet head is equipped with: a pressure generating chamber which communicates with a nozzle opening for jetting liquid; and a piezoelectric element for generating pressure variation to the pressure generating chamber, in which the piezoelectric element comprises: a first electrode; a piezoelectric layer formed on the first electrode and containing titanium (Ti) and zirconium (Zr); and a second electrode formed on the opposite side of the first electrode of the piezoelectric layer. A crystal structure obtained by measuring the piezoelectric layer within a range of 100 to 500 nm from the first electrode in a thickness direction by electronic energy loss spectrometry has a part of monoclinic system structure, fluctuation of Ti/(Ti+Zr)% when a horizontal axis is considered as distance from the first electrode and a vertical axis is considered as Ti/(Ti+Zr)% from a range to become a monoclinic system to a rhombohedral crystal system is within 10%, and fluctuation from the range to become the monoclinic system to a tetragonal system is within 10% for a measurement result. |
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