ORGANIC EL DEVICE MANUFACTURING APPARATUS AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a manufacturing apparatus or manufacturing method for an organic EL device having high productivity or high operating rate by being capable of high precision vapor deposition while reducing the deflection of a substrate and mask or capable of downsizing a transport c...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	NIRASAWA NOBUHIRO, YUMIBA KENJI, OCHIAI YUKIO, KAMEYAMA HIROKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a manufacturing apparatus or manufacturing method for an organic EL device having high productivity or high operating rate by being capable of high precision vapor deposition while reducing the deflection of a substrate and mask or capable of downsizing a transport chamber and by disposing a drive unit, etc. on the atmospheric air side to reduce the occurrence of dust and gas in a vacuum.SOLUTION: In the present invention, an alignment of a substrate and a mask in a vacuum chamber is performed while being suspended as a hanging body provided with the substrate or the mask. When an evaporation material is deposited on the substrate, a contact part of the hanging body is moved to raise the handing body vertically and then the hanging body is transported into the vacuum chamber, set at a positioning position, a transport contact part between the hanging body contact part of the hanging body and the hanging body contact part of a transport means used for transportation is separated, and the alignment is performed thereafter.