DEFECT EXTRACTION DEVICE

PROBLEM TO BE SOLVED: To provide a defect extraction device using a light-section method, which is capable of reducing the degradation of measurement accuracy of the surface shape of an object, even when multiple reflection of measuring light occurs.SOLUTION: The defect extraction device includes a...

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Bibliographische Detailangaben
Hauptverfasser:	HISANAGA MASARU, TODA MASATAKA
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a defect extraction device using a light-section method, which is capable of reducing the degradation of measurement accuracy of the surface shape of an object, even when multiple reflection of measuring light occurs.SOLUTION: The defect extraction device includes a light irradiation part irradiating a measuring object with slit light and an imaging part imaging the slit light reflected by the surface of the measuring object. The irradiation part vibrates the slit light in at least one of a first direction being a direction perpendicular to a surface formed by the slit light and a second direction being the direction parallel with the surface and the direction perpendicular to the advancing direction of the slit light.