SAMPLE HOLDER

PROBLEM TO BE SOLVED: To provide a sample holder capable of improving thickness distribution of a thin film formed on a substrate by a plasma CVD method.SOLUTION: A sample holder 10 housed in a plasma CVD device and positioned at a position opposed to an electrode arranged in a comb-like manner has...

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Bibliographische Detailangaben
Hauptverfasser:	SARUWATARI TETSUYA, IMAI DAISUKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGYGENERATION, TRANSMISSION OR DISTRIBUTION SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a sample holder capable of improving thickness distribution of a thin film formed on a substrate by a plasma CVD method.SOLUTION: A sample holder 10 housed in a plasma CVD device and positioned at a position opposed to an electrode arranged in a comb-like manner has a rectangular substrate mounting face 11 in which mounting regions 110 for mounting a substrate that is a processing object are defined. At least one part of a region along an outer edge of the substrate mounting face is a rough surface region with larger surface roughness than that of the other region of the substrate mounting face.