DEFECT INSPECTION DEVICE
PROBLEM TO BE SOLVED: To inspect a fatal defect in a specimen with high sensitivity and at a high speed.SOLUTION: The defect inspection device includes: an inspection unit 10 for obtaining a plurality of inspection images which image a periodic pattern below a resolution limit of an optical system u...
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| creator | YAMASHITA KYOJI |
| description | PROBLEM TO BE SOLVED: To inspect a fatal defect in a specimen with high sensitivity and at a high speed.SOLUTION: The defect inspection device includes: an inspection unit 10 for obtaining a plurality of inspection images which image a periodic pattern below a resolution limit of an optical system under different optical conditions relative to a tested material; edge extraction circuits 21-23 for obtaining an edge image from each of the plurality of inspection images; and a defect determination circuit 25 for determining a defect on the basis of the plurality of edge images. |
| format | Patent |
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edge extraction circuits 21-23 for obtaining an edge image from each of the plurality of inspection images; and a defect determination circuit 25 for determining a defect on the basis of the plurality of edge images.</description><language>eng</language><subject>CALCULATING ; COMPUTING ; COUNTING ; ELECTRIC COMMUNICATION TECHNIQUE ; ELECTRICITY ; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; PICTORIAL COMMUNICATION, e.g. TELEVISION ; TESTING</subject><creationdate>2014</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140224&DB=EPODOC&CC=JP&NR=2014035326A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20140224&DB=EPODOC&CC=JP&NR=2014035326A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>YAMASHITA KYOJI</creatorcontrib><title>DEFECT INSPECTION DEVICE</title><description>PROBLEM TO BE SOLVED: To inspect a fatal defect in a specimen with high sensitivity and at a high speed.SOLUTION: The defect inspection device includes: an inspection unit 10 for obtaining a plurality of inspection images which image a periodic pattern below a resolution limit of an optical system under different optical conditions relative to a tested material; 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| subjects | CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION TESTING |
| title | DEFECT INSPECTION DEVICE |
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