DEFECT INSPECTION DEVICE

PROBLEM TO BE SOLVED: To inspect a fatal defect in a specimen with high sensitivity and at a high speed.SOLUTION: The defect inspection device includes: an inspection unit 10 for obtaining a plurality of inspection images which image a periodic pattern below a resolution limit of an optical system u...

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Bibliographische Detailangaben
1. Verfasser:	YAMASHITA KYOJI
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To inspect a fatal defect in a specimen with high sensitivity and at a high speed.SOLUTION: The defect inspection device includes: an inspection unit 10 for obtaining a plurality of inspection images which image a periodic pattern below a resolution limit of an optical system under different optical conditions relative to a tested material; edge extraction circuits 21-23 for obtaining an edge image from each of the plurality of inspection images; and a defect determination circuit 25 for determining a defect on the basis of the plurality of edge images.