INFRARED RADIATION ELEMENT

PROBLEM TO BE SOLVED: To provide an infrared radiation element capable of efficiently applying infrared radiation.SOLUTION: An infrared radiation element 1 comprises: a substrate 2; a thin film 3 formed over one surface of the substrate 2; a through hole 2a which goes through in a thickness directio...

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Hauptverfasser: KIRIHARA MASAO, TSUJI KOJI, NAGATANI YOSHITADA, YOSHIHARA TAKAAKI, MATSUNAMI HIROKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an infrared radiation element capable of efficiently applying infrared radiation.SOLUTION: An infrared radiation element 1 comprises: a substrate 2; a thin film 3 formed over one surface of the substrate 2; a through hole 2a which goes through in a thickness direction of the substrate 2; a lattice-like first infrared radiation 4a formed at the opposite side of the substrate 2 in the thin film 3. The infrared radiation element 1 also comprises: plural pads 9 which are electrically connected to the first infrared radiation layer 4a; and a second infrared radiation layer 4b which is disposed separated away from the radiation layer 4a in an opening 4aa of the first infrared radiation layer 4a and which has the infrared radiation ratio higher than that of the thin film 3.