SEMICONDUCTOR DEVICE AND METHOD FOR REDUCED BIAS TEMPERATURE INSTABILITY (BTI) IN SILICON CARBIDE DEVICES

PROBLEM TO BE SOLVED: To provide a semiconductor device and method for reduced bias temperature instability (BTI) in silicon carbide devices.SOLUTION: A system includes a silicon carbide (SiC) semiconductor device 100 and a hermetically sealed packaging 130 enclosing the SiC semiconductor device. Th...

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Hauptverfasser: MICHAEL JOSEPH DARRYL, ARTHUR STEPHEN D
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a semiconductor device and method for reduced bias temperature instability (BTI) in silicon carbide devices.SOLUTION: A system includes a silicon carbide (SiC) semiconductor device 100 and a hermetically sealed packaging 130 enclosing the SiC semiconductor device. The hermetically sealed packaging 130 is configured to maintain a particular atmosphere 132 near the SiC semiconductor device 100. Further, the particular atmosphere 132 limits a shift in a threshold voltage of the SiC semiconductor device 100 to less than 1 V during operation.