SUBSTRATE TRANSFER APPARATUS

PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus capable of transferring a substrate while suppressing uneven drying of a coating film on the substrate.SOLUTION: The substrate transfer apparatus transfers a substrate while floating, by traveling a substrate guide while holding the sub...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAMAKAWA KENJI, MIYAJIMA YUYA, UCHIGATA TOMOO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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