PRESSURE SWITCH
PROBLEM TO BE SOLVED: To provide a pressure switch having an accurate switch function even in a small pressure variation, while ensuring long-term stability of the switch function.SOLUTION: A pressure switch includes a pressure sensor for detecting a pressure variation, and a control part for turnin...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a pressure switch having an accurate switch function even in a small pressure variation, while ensuring long-term stability of the switch function.SOLUTION: A pressure switch includes a pressure sensor for detecting a pressure variation, and a control part for turning on a switch when an output from the pressure sensor satisfies a predetermined condition. The pressure sensor includes a pressure reference chamber, an opening part for establishing an equilibrium condition of an inside pressure and an outside pressure of the pressure reference chamber, and a cantilever beam deforming depending on a pressure difference between an inside and an outside of the pressure reference chamber. A piezoelectric material is formed on the cantilever beam. |
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