HIGH-FREQUENCY PROBE

PROBLEM TO BE SOLVED: To provide a high-frequency probe which is easy to replace, superior in transmission characteristics, inexpensive, and adaptive to a fine pitch.SOLUTION: A high-frequency probe includes: a connector 31 to which a coaxial cable 42 from external equipment is connected; an MEMS probe 101 which has a signal wiring body and a ground wiring body, as a contact piece 12 having one end brought into contact with an electrode of a body to be inspected, formed on a base material by micro-electromechanical technology; and an impedance-matched high-frequency substrate 33 which is provided between the MEMS probe 101 and connector 31, and electrically connects a terminal part composed of the other end of the signal wiring body and ground wiring body to a connector terminal 47 of the connector 31, the MEMS probe 101 being attachable to and detachable from the high-frequency substrate 33.