ETCHANT FOR ALUMINA

PROBLEM TO BE SOLVED: To provide an etchant for alumina, which does not give a damage to IGZO.SOLUTION: Alumina is etched with an etchant containing an alkali metal carbonate and water.

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Bibliographische Detailangaben
1. Verfasser:	TAKAHASHI FUMIHARU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an etchant for alumina, which does not give a damage to IGZO.SOLUTION: Alumina is etched with an etchant containing an alkali metal carbonate and water.