IMAGE PROCESSING DEVICE, IMAGE PROCESSING METHOD, AND PROGRAM

PROBLEM TO BE SOLVED: To solve a problem that resolution of a reflection electron image with little contrast difference formed in a case of materials having close atomic numbers is low.SOLUTION: An image processing device performing image processing using a reflection electron image as an input image, comprises: a material peak detector receiving the input image, calculating a peak luminance value having a peak of a frequency of luminance histogram based on a luminance value obtained for each measurement position by using generation efficiency information of reflection electrons that depends on a material, and outputting the peak luminance value for each material; and an image information adjustment part emphasizing contrast that depends on the materials on the basis of the input image and the peak luminance value for each material.