ION BEAM GENERATOR

PROBLEM TO BE SOLVED: To provide an ion beam generator capable of making and neutralizing plasma by using only one electron source disposed outside of a discharge chamber.SOLUTION: The ion beam generator capable of being operated only by one electron source is provided by using an ion acceleration s...

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Bibliographische Detailangaben
Hauptverfasser: HAYAKAWA YUKIO, MIYAZAKI KATSUHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an ion beam generator capable of making and neutralizing plasma by using only one electron source disposed outside of a discharge chamber.SOLUTION: The ion beam generator capable of being operated only by one electron source is provided by using an ion acceleration system 4 for not only releasing ion current but also taking electronic current from the external, by adjusting an acceleration grid voltage, disposing ion passing holes 5a, 5b in an acceleration grid 4b and a screen grid 4a with a pattern different from a conventional one, and also changing areas of the passing holes, and the like.