DEVICE AND METHOD FOR ETCHING

PROBLEM TO BE SOLVED: To solve such a problem that, when a fine circuit pattern is formed during a circuit forming process of a copper-clad substrate, a line width of a circuit pattern is likely to vary depending on the level of skill of operators in the conventional control methods where processing...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YONETAKE SATORU, NISHIMURA NAOKI, SATO SHINICHI
Format: Patent
Sprache:eng
Schlagworte:
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