DIELECTRIC MEMBER, FILM FORMING APPARATUS AND THIN-FILM FORMING METHOD

PROBLEM TO BE SOLVED: To provide a film forming apparatus for forming a DLC on the inner surface of a plastic container, which can form the DLC having sufficient gas-barrier property while preventing the generation of abnormal discharging without thickening a dielectric member to be provided within...

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Bibliographische Detailangaben
Hauptverfasser:	SAMEJIMA TAKUYA, HASEGAWA KUMIKO, YANAGIHARA HIDETO
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a film forming apparatus for forming a DLC on the inner surface of a plastic container, which can form the DLC having sufficient gas-barrier property while preventing the generation of abnormal discharging without thickening a dielectric member to be provided within the film forming apparatus more than necessary.SOLUTION: A dielectric member that is formed into a bottomed cylinder shape and is arranged on the inside of an external electrode of a film forming apparatus for forming a DLC on the inner surface of a plastic container, is provided together with the external electrode in such a manner that it may be divided into an upper half part and a lower half part, and a joining part between the upper and lower half parts is formed to have such a cross-sectional shape that the length of the joining surface of the joining part is larger than the thickness of the dielectric member.