RESIN STAMPER MANUFACTURING APPARATUS

PROBLEM TO BE SOLVED: To provide a resin stamper manufacturing apparatus capable of efficiently manufacturing a plurality of resin stampers.SOLUTION: A resin stamper manufacturing apparatus 1 manufactures: a support base material storage unit 2 configured to store a plurality of support base materia...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WASHITANI RYUTA, OGINO MASAHIKO, MIYAUCHI AKIHIRO, MORI KYOICHI, SHIZAWA NORITAKE
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a resin stamper manufacturing apparatus capable of efficiently manufacturing a plurality of resin stampers.SOLUTION: A resin stamper manufacturing apparatus 1 manufactures: a support base material storage unit 2 configured to store a plurality of support base materials 22; and a plurality of intermediate resin stampers 20 by transferring a fine structure 10a of a previously prepared matrix stamper 10 to a photocurable resin composition applied to the support base material 22, and also manufactures a plurality of resin stampers 30 by transferring a fine structure 20a of the intermediate resin stamper 20 to the photocurable resin composition applied to the support base material 22.