PHASE DIFFERENCE DETECTION DEVICE, PHASE DIFFERENCE DETECTION PROGRAM, AND PLASMA PROCESSING SYSTEM USING PHASE DIFFERENCE DETECTION DEVICE

PHASE DIFFERENCE DETECTION DEVICE, PHASE DIFFERENCE DETECTION PROGRAM, AND PLASMA PROCESSING SYSTEM USING PHASE DIFFERENCE DETECTION DEVICE

PROBLEM TO BE SOLVED: To quickly and highly accurately detect a phase difference between two AC signals.SOLUTION: A phase difference operation part calculates a phase difference (= - ) of two detected voltages v(phase angle ), v(phase angle ). After operating v=v×v, v=v×v, v=v×v, v=v×vby using a sin...

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Bibliographische Detailangaben
Hauptverfasser: KASAI YOSHINOBU, YOSHIZAKO YUJI, KITANO TOYOKAZU
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
SEMICONDUCTOR DEVICES
TESTING
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Zusammenfassung:PROBLEM TO BE SOLVED: To quickly and highly accurately detect a phase difference between two AC signals.SOLUTION: A phase difference operation part calculates a phase difference (= - ) of two detected voltages v(phase angle ), v(phase angle ). After operating v=v×v, v=v×v, v=v×v, v=v×vby using a sine wave vand a cosine wave vhaving the same frequency as a basic frequency of the generated voltages v,v, DC components I=(A/2)*sin( ), R=(A/2)*cos( ), I=(A/2)*sin( ), R=(A/2)*cos( ) are extracted by a low pass filter. A complex multiplier operates R=R×R+I×I, calculates R=(A*A/4)*cos( ), operates I=R×I-R×I, and calculates I=(A*A/4)*sin( ). An inverse tangent computing unit operates =tan(I/R) and calculates a phase difference .