METHOD AND DEVICE FOR CAPTURING IMAGE

PROBLEM TO BE SOLVED: To provide a method and a device for capturing an image, which allow focusing on an entire surface of a widespread sample with high resolution.SOLUTION: A method of capturing an image includes the steps of: dividing a surface figure of a sample 103 into a plurality of regions (S203); approximating a surface figure of each region with a plane and obtaining the amount of inclination of each plane (S204); creating n groups of regions, each comprising regions having planes with inclination within a predetermined range, from the plurality of regions (S207); tilting the sample such that the amount of inclination of all the planes belonging to a group i of the n groups is within a depth of focus (S215); having a plurality of image sensors responsible for the regions belonging to the group i capture images of the sample (S217); and repeating the tilting step and the image capturing step replacing i with another number until all the numbers from 1 to n are covered (S218).