GROOVING DEVICE FOR SUBSTRATE

PROBLEM TO BE SOLVED: To enable grooving to be precisely performed by stabilizing a grooving tool when forming a groove in a substrate using a head where the grooving tool is supported in a freely swingable state.SOLUTION: A grooving device is configured to form a groove along a patterning line of a substrate, and includes a table 1 on which the substrate is placed, a head 3 which has a swing axis S on which the grooving tool 2 is supported to freely swing, and includes a holder body 22 and a support member 23 restricting the grooving tool 2 from moving along the swing axis, and a moving mechanism 6 for moving the table 1 and head 3 relatively in a horizontal plane. The swing axis is inclined to an axis intersecting a processing direction in which the grooving tool 2 moves in the horizontal plane, and the grooving tool 2 is movable along the axial direction of the swing axis.