INJECTION DEVICE AND INJECTION METHOD

PROBLEM TO BE SOLVED: To provide an injection device and an injection method which allow for accurate injection of a high viscosity material, as an injected material, toward an object.SOLUTION: When a pressure generation member 42, corresponding to an irradiation object injection hole, is irradiated with laser light from a laser light irradiation unit 60 while passing through a substrate 41, the pressure generation member 42 containing a sublimable material absorbs the laser light and the temperature of which rises in a short time to generate a pressure wave by rapid volume expansion. Since the center position of laser light irradiation region is biased from the center of an irradiation object injection hole, a strong pressure wave is generated starting from a position deviated from the center of an irradiation object injection hole. As a result, injection direction of a metal paste 43 is corrected reversely from the bias direction of laser light irradiation position. Since the metal paste 43 is injected vertically upward, the metal paste 43 of high viscosity material can be injected accurately toward a substrate W.