SEMICONDUCTOR PHOTONIC DEVICE AND OPTICAL MODULE
PROBLEM TO BE SOLVED: To effectively radiate heat generated around the center of a resonator of a semiconductor photonic device to the outside.SOLUTION: A semiconductor photonic device 100A comprises: a semiconductor substrate 1; an optical waveguide composed of at least a part of a semiconductor la...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To effectively radiate heat generated around the center of a resonator of a semiconductor photonic device to the outside.SOLUTION: A semiconductor photonic device 100A comprises: a semiconductor substrate 1; an optical waveguide composed of at least a part of a semiconductor lamination part including a clad layer and an active layer stacked above the semiconductor substrate 1; an AlN embedded part 18 which is embedded in a groove formed at least under the optical waveguide and inside the semiconductor substrate 1 and formed by a material having thermal conductivity higher than that of a material for forming the semiconductor substrate 1; a p electrode 15; a silicon oxide film 14 provided on an undersurface of the p electrode 15; and an AlN film 13 formed between the silicon oxide film 14 and the semiconductor lamination part and formed by a material which is an insulating material and has thermal conductivity higher than that of a material for forming the semiconductor lamination part. |
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