SCANNING MICROSCOPE HAVING ADAPTIVE SCANNING

PROBLEM TO BE SOLVED: To provide a method for quickly forming a digital image of an area by using a scanning microscope.SOLUTION: A method includes steps of performing an initial scanning set to form a guide pixel set to an area, using the guide pixel set to identify a region that represents a struc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CLIFF BUGGE, BRANDON VAN LEER
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method for quickly forming a digital image of an area by using a scanning microscope.SOLUTION: A method includes steps of performing an initial scanning set to form a guide pixel set to an area, using the guide pixel set to identify a region that represents a structure of an object in the area, and then performing additional scanning of the region that represents the structure of the object to collect additional data in order to evaluate pixels in the region without scanning other regions in the area.