METHOD FOR MANUFACTURING VAPOR DEPOSITION MASK

PROBLEM TO BE SOLVED: To provide a method for manufacturing a vapor deposition mask, which satisfies both enhancement in definition and a reduction in weight even if a size is increased.SOLUTION: A method for manufacturing a vapor deposition mask 100 that is formed by laminating a metal mask 15 form...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	NISHIMURA SUKEYUKI, HOTTA TAKESHI, OBATA KATSUYA, TAKEDA TOSHIHIKO, KENMORI HIDESUKE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for manufacturing a vapor deposition mask, which satisfies both enhancement in definition and a reduction in weight even if a size is increased.SOLUTION: A method for manufacturing a vapor deposition mask 100 that is formed by laminating a metal mask 15 formed with a slit 16 and a resin mask 25 formed with an opening corresponding to a pattern to be produced in a position overlapping with the slit by means of vapor deposition, each other includes: a step of forming a recessed part having an opened shape wider than the opening 50 of the resin mask, in a metal plate 10 by etching one surface of the metal plate so as not to perforate the metal plate; a step of forming a resin layer on the one surface of the metal plate so as to cover the recessed part; a step of forming the metal mask by etching the other surface of the metal plate to form the slit that is integrated with the recessed part in the metal plate; and a step of forming the resin mask by forming the opening corresponding to the pattern to be produced in the resin layer by means of vapor deposition.