FLOW SENSOR

PROBLEM TO BE SOLVED: To provide a flow sensor which further assures the most successful possible circulation to a sensor element except the largest possible mechanical stability and insensitivity to contamination.SOLUTION: A flow sensor for directly measuring mass flow has: a highly rigid conductive support part 1; a sensor element 2; and a stable encapsulation part 3, in which the sensor element 2 is connected to the support part 1 via a conductive coupling part 8, the sensor element 2 has a plate-like support substrate, at least one temperature sensor 5 and a heating element 4 are arranged on the support substrate, the encapsulation part 3 surrounds the sensor element 2 and the support part 1 partially in an engagement type, areas on the upper surface and the lower surface of the sensor element 2 are not covered with the encapsulation part 3, and flow which should be measured is not hindered to circulate the areas.