CLEANING METHOD AND CLEANING SOLUTION
PROBLEM TO BE SOLVED: To clean an object to be cleaned having a fine structure or an uneven surface due to wiring or the like while securely removing foreign matter inside the fine structure or the uneven surface.SOLUTION: An object to be cleaned is cleaned using a cleaning solution which has viscos...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To clean an object to be cleaned having a fine structure or an uneven surface due to wiring or the like while securely removing foreign matter inside the fine structure or the uneven surface.SOLUTION: An object to be cleaned is cleaned using a cleaning solution which has viscosity of 0.5 mPa s or less and contains as a principal constituent a nonionic surfactant whose general formula is preferably either the formula (1), R-O-S, or the formula (2), R-O(RO)-R. The cleaning solution relatively easily enters into a fine structure or an uneven surface and facilitates removing foreign matter. |
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