MICROSTRUCTURE TRANSFER DEVICE AND MICROSTRUCTURE TRANSFER METHOD

PROBLEM TO BE SOLVED: To provide a microstructure transfer device having excellent transfer accuracy in which releasing properties can be ensured even if continuous transfer is repeated, and to provide a microstructure transfer method.SOLUTION: Releasing properties are ensured and transfer failure i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WASHITANI RYUTA, HASEGAWA MITSURU, OGINO MASAHIKO, MIYAUCHI AKIHIRO
Format: Patent
Sprache:eng
Schlagworte:
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