ELECTROSTATIC CHUCK

PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of improving insulation reliability between a power feeding terminal and a base member.SOLUTION: An electrostatic chuck 1 has: a metallic base member 10 having through holes 11X, 13X penetrating in a thickness direction; an electrostatic chuck substrate 30 adhered to the base member 10; and an electrode 40 built in the electrostatic chuck substrate 30, and generating an electrostatic load required for adsorbing an adsorbed object. Also, the electrostatic chuck 1 has: a recess section 30X formed on the electrostatic chuck substrate 30 and exposing one part of the electrode 40; an adhesion layer 20 formed between the electrostatic chuck substrate 30 and the base member 10, and coating an inner face of the recess section 30X; and a cylindrical insulative member 70 inserted in the recess section 30X and having a through hole 70X penetrating in the thickness direction. Furthermore, the electrostatic chuck 1 has a power feeding terminal 54 inserted in the through holes 11X, 13X, 70X, and electrically connected to the electrode 40 whose tip is exposed from the recess section 30X.