POSITIONING DEVICE, EXPOSING DEVICE AND DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To improve measurement accuracy by reducing deformation of a scale in a plate thickness direction in a positioning device provided with the scale and an encoder.SOLUTION: A positioning device comprises: a structure; a supporting unit that is provided on the structure and supports a scale; an encoder for measuring a position of a moving body with respect to the scale; a measuring instrument for measuring a position of the scale with respect to the structure associated with a plate thickness direction of the scale or a member supported by the structure; and a driving section for driving the moving body on the basis of output of the encoder. The supporting unit is configured so as to reduce vibration transmission from the structure in association with the plate thickness direction and is provided with a driving section for moving the scale in the plate thickness direction on the basis of output of the measuring instrument.