METHOD FOR EVALUATING (METH)ACRYLATE AND METHOD FOR PRODUCING COPOLYMER FOR LITHOGRAPHY

PROBLEM TO BE SOLVED: To provide an evaluation method, by which a monomer to be used for the production of a copolymer for lithography can be accurately and easily evaluated, and to produce a copolymer for lithography in which a weight average molecular weight (Mw) or a molecular distribution (Mw/Mn...

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Bibliographische Detailangaben
Hauptverfasser:	MIHASHI TAKASHI, KATO KEISUKE
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTROGRAPHY HETEROCYCLIC COMPOUNDS HOLOGRAPHY MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MATERIALS THEREFOR METALLURGY ORGANIC CHEMISTRY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an evaluation method, by which a monomer to be used for the production of a copolymer for lithography can be accurately and easily evaluated, and to produce a copolymer for lithography in which a weight average molecular weight (Mw) or a molecular distribution (Mw/Mn) is precisely controlled, by using the above method.SOLUTION: A method for evaluating a (meth)acrylate includes a step of detecting an insoluble substance when a (meth)acrylate is dissolved in a solvent. The solvent used is a compound showing a difference of 2 MPaor more in a solubility parameter by Fedors method from a (meth)acrylate as an evaluation target.