METHOD FOR INSPECTING CRYSTAL WAFER

PROBLEM TO BE SOLVED: To provide an inspection method capable of measuring a multi-point resonance frequency of a crystal wafer 1 without damaging the crystal wafer 1.SOLUTION: A method for inspecting a crystal wafer comprises: a step S1 of mounting a crystal wafer 1 on a pedestal 4 movably installe...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KAWAI NOBORU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS RESONATORS TESTING
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