METHOD FOR INSPECTING CRYSTAL WAFER

PROBLEM TO BE SOLVED: To provide an inspection method capable of measuring a multi-point resonance frequency of a crystal wafer 1 without damaging the crystal wafer 1.SOLUTION: A method for inspecting a crystal wafer comprises: a step S1 of mounting a crystal wafer 1 on a pedestal 4 movably installed on a stage 3 in which a plate body 2 is provided; a step S2 of approximating a detection terminal 6 of a network analyzer 5 to the crystal wafer 1 and measuring a resonance frequency; and a step S3 of moving the pedestal 4 according to the plate body 2. A multi-point resonance frequency of the crystal wafer 1 is measured by repeatedly performing the step S2 and the step S3.