COLUMNAR STRUCTURE MANUFACTURING METHOD
PROBLEM TO BE SOLVED: To provide a method of inhibiting surface diffusion of an eutectic catalyst over a base substance and aggregation of catalyst grains when an intended columnar structure is obtained by using a VLS method.SOLUTION: A semiconductor manufacturing method comprises: a process of prep...
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| creator | KOTO MAKOTO |
| description | PROBLEM TO BE SOLVED: To provide a method of inhibiting surface diffusion of an eutectic catalyst over a base substance and aggregation of catalyst grains when an intended columnar structure is obtained by using a VLS method.SOLUTION: A semiconductor manufacturing method comprises: a process of preparing a base substance having a locking part; arranging a catalyst on the locking part; and a process of growing a semiconductor between the catalyst and the locking part. An eutectic temperature of the catalyst and the semiconductor is lower than an eutectic temperature of the locking part and the base substance. |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MICROSTRUCTURAL TECHNOLOGY NANOTECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING |
| title | COLUMNAR STRUCTURE MANUFACTURING METHOD |
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