INSPECTION APPARATUS AND IMAGE CAPTURING DEVICE

PROBLEM TO BE SOLVED: To provide an inspection apparatus improving inspection sensitivity more highly and/or detection reproducibility of a defect.SOLUTION: An image capturing device comprises a plurality of sensor pixels arrayed in a predetermined direction, each of which makes at least one side of...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	JINGU TAKAHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an inspection apparatus improving inspection sensitivity more highly and/or detection reproducibility of a defect.SOLUTION: An image capturing device comprises a plurality of sensor pixels arrayed in a predetermined direction, each of which makes at least one side of a pair of sensor pixel boundary sides facing each other in an arrayed direction, among a plurality of sensor pixel boundary sides forming an outer edge part of the sensor pixel, vertical to the predetermined direction and inclined to a passing direction of a defect image.