ELECTROLESS METAL PLATING APPARATUS

PROBLEM TO BE SOLVED: To provide an electroless metal plating apparatus which can extend the life of an electroless plating solution and also stably perform continuous plating.SOLUTION: An electroless metal plating apparatus includes: a plating tank for immersing a substrate to be plated into a plat...

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Bibliographische Detailangaben
Hauptverfasser:	KAWAMURA TOSHINORI, MIYAZAKI SATOYUKI, KANEMOTO MASARU, AKABOSHI HARUO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an electroless metal plating apparatus which can extend the life of an electroless plating solution and also stably perform continuous plating.SOLUTION: An electroless metal plating apparatus includes: a plating tank for immersing a substrate to be plated into a plating solution and plating the substrate with a metal; a metal dissolution tank in which the metal is dissolved with the plating solution extracted from the plating tank for replenishing ions of the metal thereto; an oxygen-enriched gas feeding unit for feeding an oxygen-enriched gas to the plating solution fed to the metal dissolution tank; an aeration tank for lowering the concentration of dissolved oxygen contained in the plating solution fed from the metal dissolution tank to produce an aeration fluid; and an aeration fluid conveying unit for transferring the aeration fluid to the plating tank from the aeration tank. The aeration tank includes a micro-air feeding unit for feeding air with a fine bubble diameter to the plating solution within the aeration tank.