Li-CONTAINING PHOSPHORIC ACID COMPOUND SINTERED BODY AND SPUTTERING TARGET, AND METHOD FOR MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a Li-containing phosphoric acid compound sintered body including both high relative density and very small crystal grain diameter with reduced incidence of defects (gaps) such as air holes, wherein the sintered body enables to stably form a Li-containing phosphoric a...

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Bibliographische Detailangaben
Hauptverfasser:	TAO KOKI, KANAMARU MORIYOSHI, TAKETOMI YUICHI
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS COMPOUNDS OF ALKALI METALS, i.e. LITHIUM, SODIUM, POTASSIUM,RUBIDIUM, CAESIUM, OR FRANCIUM CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY LIME, MAGNESIA METALLURGY PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a Li-containing phosphoric acid compound sintered body including both high relative density and very small crystal grain diameter with reduced incidence of defects (gaps) such as air holes, wherein the sintered body enables to stably form a Li-containing phosphoric acid compound thin film useful as a solid electrolyte for a secondary cell or the like at a high film-forming speed without any incidence of target cracking and abnormal electrical discharge.SOLUTION: A Li-containing phosphoric acid compound sintered body contains no defects of ≥50 μm within a region having a cross section of 1 mmin the interior of the sintered body, while having an average crystal grain diameter of ≤15 μm and a relative density of ≥85%.