WAFER PROCESSING METHOD

PROBLEM TO BE SOLVED: To form a crystal wafer 1 whose contour has a pseudo circle and in which an orientation flat 6 representing an accurate crystal orientation is formed.SOLUTION: A wafer processing method includes: a lamination step of forming a stack 2 of a quadrangular prism, by arranging a ref...

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1. Verfasser: KAWAI NOBORU
Format: Patent
Sprache:eng
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