CONVEYING ARM, CONVEYING DEVICE, AND CONVEYING METHOD

CONVEYING ARM, CONVEYING DEVICE, AND CONVEYING METHOD

PROBLEM TO BE SOLVED: To provide a conveying arm, a conveying device, and a conveying method for conveying a substrate while controlling charging by metal contamination and static electricity.SOLUTION: A conveying arm 1 of a substrate 11 includes: a holding part 12, consisting of an insulator, that...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: MINAMINO RYUJI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
HANDLING THIN OR FILAMENTARY MATERIAL
MANIPULATORS
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a conveying arm, a conveying device, and a conveying method for conveying a substrate while controlling charging by metal contamination and static electricity.SOLUTION: A conveying arm 1 of a substrate 11 includes: a holding part 12, consisting of an insulator, that contacts with and holds the substrate 11; a metal part 13, consisting of a conductor, that is grounded; and a conductive coating 14, consisting of a conductor, that contacts with the substrate 11 and the metal part 13. Moreover, a conductive part 14 is located between the substrate 11 and the grounded part 13 and is fixed by the grounded part 13.