METHOD FOR MANUFACTURING GROUP 13 NITRIDE CRYSTAL SUBSTRATE

PROBLEM TO BE SOLVED: To provide a method for manufacturing a group 13 nitride crystal substrate capable of performing grinding while suppressing occurrence of a scratch on a crystal surface using a grind stone having a stable grinding surface without performing complicated work when grinding a grou...

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Bibliographische Detailangaben
1. Verfasser:	KAJIMOTO TETSUJI
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CRYSTAL GROWTH DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING METALLURGY PERFORMING OPERATIONS POLISHING PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH TRANSPORTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for manufacturing a group 13 nitride crystal substrate capable of performing grinding while suppressing occurrence of a scratch on a crystal surface using a grind stone having a stable grinding surface without performing complicated work when grinding a group 13 nitride crystal using a fixed abrasive grain, and further providing a high-quality group 13 nitride semiconductor substrate.SOLUTION: A method for manufacturing a group 13 nitride crystal substrate includes the steps of: grinding a group 13 nitride crystal using a grind stone at which an abrasive grain is fixed; and dressing the grind stone. The dressing step is performed when the stress applied to the group 13 nitride crystal becomes 0.3 to 0.7 kg/cmduring the grinding step.