Ag ALLOY FILM AND METHOD FOR FORMING THE SAME

PROBLEM TO BE SOLVED: To provide an Ag alloy film having excellent resistance such as moisture resistance, sulphur resistance and heat resistance, also having high reflectance and having low resistivity, and a method for forming the same.SOLUTION: An Ag-Sb alloy film is formed by heat-treating an Ag...

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Hauptverfasser:	KIKUCHI FUMITAKE, NAKAZAWA HIROMI, ISHII HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	ALLOYS CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS ANDNON-FERROUS ALLOYS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an Ag alloy film having excellent resistance such as moisture resistance, sulphur resistance and heat resistance, also having high reflectance and having low resistivity, and a method for forming the same.SOLUTION: An Ag-Sb alloy film is formed by heat-treating an Ag alloy film-formed by performing sputtering on a substrate using an Ag-Sb alloy target essentially composed of Ag and including 0.5 to 2.0 at% Sb at 150 to 450°C. By the heat treatment, the crystal grains of the Ag-Sb alloy grow in an in-plane direction, and large crystal grains are formed to improve its reflectance. Further, accumulated Sb forms oxides on the surfaces and grain boundaries of the crystal grains, thus it has excellent resistance in heat resistance, salt water resistance and sulfur resistance, and the resistivity of the film itself is reduced as well.