INSPECTION STAGE APPARATUS AND SUBSTRATE INSPECTION APPARATUS

PROBLEM TO BE SOLVED: To prevent a substrate from sticking on an inspection stage where the substrate is to be mounted on.SOLUTION: An inspection stage apparatus comprises a stage 2. The stage 2 includes substrate holding parts 201 to 214 whose substrate mounting surfaces are irregular and having pool-like concave parts 241 to 251. The pool-like concave parts 241 to 251 are provided with vacuum suction holes 24 and air pressure holes 25, so that a substrate contacts the substrate mounting surface at a minimum area as far as possible. In addition, the air pressure holes for releasing a vacuum state are provided apart from the vacuum suction holes, so that the substrate can be efficiently prevented from sticking on the concave parts. The concave parts are provided on a part of the substrate holding part, and concave grooves having both sides in a same hight with the concave parts are provided on the rest of the substrate holding part. The concave parts are provided at four corners, in a way to fit a size of the substrate. Pin relief holes are arranged in a zigzag pattern, so that various sizes of glass substrates can be accepted.