MEASURING METHOD AND MEASURING APPARATUS OF SEMICONDUCTOR ELEMENT

PROBLEM TO BE SOLVED: To provide a measuring method and a measuring apparatus of a semiconductor element capable of shortening the measurement time.SOLUTION: A plurality of DUTs are prepared, the collector electrodes thereof are connected with a common power supply HV, and the currents flowing between the emitter electrodes of the plurality of DUTs and the ground are measured individually. A measuring apparatus 10 includes a prober stage 12 having a prober stage electrode surface, a prober stage 12 power supply for connection with the prober stage electrode surface, a probe card 16, a plurality of interconnections W, and a plurality of ammeters Am provided in the way of the plurality of interconnections W, respectively. The probe card 16 has a plurality of terminals separated electrically from each other, and when the plurality of terminals are arranged on the prober stage 12 while directing the prober stage electrode surface side, the plurality of terminals face a plurality of parts on the prober stage electrode surface, respectively. The plurality of interconnections connect the plurality of terminals of the probe card 16 and the ground terminal individually.