ION IMPLANTER

PROBLEM TO BE SOLVED: To solve the problems of a conventional ion implanter that a seal member, i.e., a seal ring, ruptures, that an O-ring projects and that product defects occur.SOLUTION: The ion implanter has a system for incorporating a conductor in a seal ring, and detecting abnormalities of th...

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Bibliographische Detailangaben
Hauptverfasser:	IJICHI MASAYOSHI, UDO DAISUKE, ISHIMARU HIROYUKI, ARAKI MAMORU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING CYLINDERS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING PISTONS SEALINGS SEMICONDUCTOR DEVICES THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To solve the problems of a conventional ion implanter that a seal member, i.e., a seal ring, ruptures, that an O-ring projects and that product defects occur.SOLUTION: The ion implanter has a system for incorporating a conductor in a seal ring, and detecting abnormalities of the seal ring by monitoring the current value of the conductor. Other ion implanter has a cavity in the seal ring, and detects abnormalities of the seal ring by compressing the cavity and detecting the pressure in the cavity.