METHOD OF MANUFACTURING THIN FILM TRANSISTOR
PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin film transistor capable of preventing an arc formation during crystallization of an amorphous silicon layer with conducting heat of a metal layer.SOLUTION: Provided is a method of manufacturing a thin film transistor comprising: a sub...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin film transistor capable of preventing an arc formation during crystallization of an amorphous silicon layer with conducting heat of a metal layer.SOLUTION: Provided is a method of manufacturing a thin film transistor comprising: a substrate including a pixel portion and an interconnection portion; a buffer layer located on the substrate; a gate electrode and a gate interconnection that are located on the buffer layer, with the gate electrode at the pixel portion and the gate interconnection at the interconnection portion; a gate insulating layer located over the whole substrate; a semiconductor layer located on the gate electrode; source and drain electrodes electrically connected to the semiconductor layer, and a metal pattern located on the gate interconnection. |
---|