MODULAR CLUSTER TOOL

PROBLEM TO BE SOLVED: To provide a modular cluster tool.SOLUTION: A modular cluster tool is disclosed. According to one embodiment, a system comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment...

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Bibliographische Detailangaben
Hauptverfasser:	J B PRICE, ERIC WINGER, DAVID ADAMS, LAWRENCE WISE, JED KELLER, LAURENCE DULMAGE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a modular cluster tool.SOLUTION: A modular cluster tool is disclosed. According to one embodiment, a system comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment front end module interface, and two or more shuttle lock interfaces. Four linear wafer drives 111a to 111d and an EFEM 115 are connected to a wafer transfer station 101 via slot valves 122a to 122e. Each of the linear wafer drives 111a to 111d is also connected to a processing module 112 via slot valves 123.