CAPACITANCE TYPE SENSOR

PROBLEM TO BE SOLVED: To provide a capacitance type planar sensor in which the increase in electric resistance in a lengthwise direction of electrodes is suppressed and which is relatively inexpensive and has high accuracy of surface pressure distribution measurement.SOLUTION: A capacitance type sen...

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Bibliographische Detailangaben
Hauptverfasser: MAEDA ICHINOSUKE, SHIBATA TETSUYOSHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a capacitance type planar sensor in which the increase in electric resistance in a lengthwise direction of electrodes is suppressed and which is relatively inexpensive and has high accuracy of surface pressure distribution measurement.SOLUTION: A capacitance type sensor 1 includes: a dielectric layer 10 made of a polymer; long-sized front-side electrodes 01X to 08X arranged on the front side of the dielectric layer 10; long-sized rear-side electrodes 01Y to 08Y arranged on the rear side of the dielectric layer 10; front-side interconnections 01x to 08x connected to the front-side electrodes; rear-side interconnections 01y to 08y connected to the rear-side electrodes; and a plurality of detection parts A0101 to A0808 formed between the front-side electrodes and the rear-side electrodes. Each of the front-side electrodes and the rear-side electrodes includes long-sized electrode bodies 21 and 31 containing a binder and a conductive material and extension interconnection parts 22 and 32 extending in a lengthwise direction of the electrode bodies 21 and 31 and having lower volume resistivity than the electrode bodies 21 and 31, and the front-side interconnections and the rear-side interconnections have lower volume resistivity than the electrode bodies 21 and 31.