INORGANIC POWDER FOR AEROSOL DEPOSITION METHOD, AND METHOD OF MANUFACTURING INORGANIC FILM USING THE SAME

PROBLEM TO BE SOLVED: To provide film forming raw powder that increase a supply speed of the powder and stabilizes supply of the powder when used for an aerosol deposition method.SOLUTION: There is provided inorganic powder used as a film forming raw material for an aerosol deposition method, wherei...

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Bibliographische Detailangaben
Hauptverfasser:	IMAI KATSUHIRO, YOSHIKAWA JUN, MATSUSHIMA KIYOSHI, OKOUCHI SOTA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CABLES CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F CONDUCTORS DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY INSULATORS METALLURGY SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide film forming raw powder that increase a supply speed of the powder and stabilizes supply of the powder when used for an aerosol deposition method.SOLUTION: There is provided inorganic powder used as a film forming raw material for an aerosol deposition method, wherein the inorganic powder includes a plurality of inorganic particles made of ceramics and/or metals, and Carr's flowability index is 0-23.