MIRROR DEFECT DETECTION DEVICE FOR DIGITAL MICROMIRROR DEVICE

PROBLEM TO BE SOLVED: To provide a mirror defect detection device for a digital micromirror device which can easily detect mirror defects in the digital micromirror device applied to exposure equipment, and can easily detect defects in a mirror included in the digital micromirror device by simply configuring an image verification unit with an image sensor and a camera.SOLUTION: An embodiment comprises: a light source part which emits light; an illumination optical system which adjusts intensity and energy distribution of the light emitted from the light source part; a first reflector that transfers the light, which is supplied from the illumination optical system, to a mirror of a digital micromirror device; an imaging optical system which adjusts magnification of a modulated beam transferred via the mirror of the digital micromirror device; a second reflector which transfers the beam supplied from the imaging optical system; and an image verification unit which checks the modulated beam supplied via the second reflector to verify defects in the mirror.